Biyolojik uygulamalar için, kırınım ızgaraları kullanılan mikro-gravimetrik bir ölçüm metodu geliştirilmesi

A micromechanical system is developed utilizing a diffraction grating for high-precision displacement measurements. The device is in the form of released cantilevers and bridges made of Ni suspended over a Si surface.. Hence, an operational diffraction grating is obtained. The structures are actuated in their resonant mode through magnetic means. A photodetector setup is built to track changes in the resonance behavior. The quality of the setup is evaluated using a well-calibrated sputtering system and applicability of the device to biosensing is demonstrated with human opioid receptors.