Design of optomechanical sensing devices based on Al2O3 platform

Light has been used for a very long time. As a result, equipment with principles of operation based on the transmission and reflection of light has been created. In this paper, integrated ring resonator-based sensors are the main subject of design and analytical studies. Like standard MEMS in operation, studying MOEMS structures produces superior results in key areas including sensitivity, noise, and shock value. A single-mode ridge waveguide geometry and an Al2O3-based ring resonator form the designed devices. Superior features like a high refractive index, rare earth ion doping, high light confinement, minimal loss, stability, transparency, and adaptability to optical fibers are provided by Al2O3 for the integrated circuit. The MOEMS accelerometer can be created using a ring resonator device formed of Al2O3. The system is based on the theory that the cantilever structure's acceleration-induced bending changes the ring resonator's refractive index, affecting the wavelength shift's measurement. Analyses of the designed accelerometer's optics and mechanics were performed. This optimization research used numerical techniques like FDTD and FEM. The parameters collected as a consequence of the analysis were used to improve the device. The study has revealed that a more sensitive accelerometer that is also less expensive and has high sensitivity and a low noise ratio than those on the market has been created.