Deposition of TiSiN coatings, investigation of mechanical and wear properties

Physical vapor deposition (PVD) method, known as an industrial surface coating method, is a preferred coating technique for improving the mechanical and tribological properties of metallic materials. Within the scope of this thesis, the structural, mechanical and tribological properties of the coating grown on Al2024 and 52100 steel substrates by increasing the silicon (Si) amount in the TiSiN film with the PVD technique were investigated. The aim of this study was to obtain low friction coefficient, high hardness and high wear resistance by changing Si amount ( Si: %10-14-20). Structural properties of the grown TiSiN thin films were determined by XRD and SEM, mechanical properties were determined by Vickers microhardness and tribological properties were determined by Pin-on-disc wear test devices in atmospheric environment. As the Si value increased as a result of XRD analysis, a slight decrease in peak intensities and a transition from crystalline structure to amorphous structure were observed. The lowest coefficient of friction was determined as 0.52 at Al2024 Si:%10 under 1 N load. In addition, the highest hardness value was determined as 618 HV0,1 in TiSiN Si:%20 grown on 52100 steel, and the highest film thickness was 2.05 µm in TiSiN film grown with Si:%20. It was observed that there were significant changes in the mechanical and tribological properties with the increase of the Si amount in the film structure.