Magnetically actuated mems scanners for laser scanning confocal microscopy

Magnetically actutated micro-scanners are fabricated via three-dimensional (3D) printing and laser machining technologies to use in a laser scanning confocal microscopy application. First, a 3D printed polymer based scanning mirror with magnetic actuation is designed to meet a confocal microscopy application providing 100 µm × 100 µm field of view and less than 3-µm lateral resolution. Stress distribution along the circular-profiled flexure is compared with a rectangular counterpart in finite-element environment. The resonance frequencies of the device were analytically modeled. Finally, imaging experiments were conducted on a resolution target, showcasing the desired scan area and resolution. In the second part of thesis, laser machining technology is used to produce stainless steel the micro-scanners. First device is developed for a 2D confocal imaging application. This device tested with the United States Air Force target accomplishing a 200 µm × 200 µm field of view and sub 10 µm resolution. In the following study, a micro-scanner with multi-gimbaled structure is designed and produced for 3D Lissajous confocal imaging application. This device can work in three different out-of-plane modes in order to control the focus of the confocal system. Final study contains a micro-scanner for 3D beam steering with better performance specifications, such as higher TOSA for less current consumption, increased resonance frequencies and smaller total size of the device as opposed to the previously designed micro-scanners. Also, fabricated micro-scanner is integrated in a confocal system and 2D image of a biological sample; convallaria rhizome, is obtained. Furthermore, a novel 3D confocal microscopy configuration is proposed and it's validty is tested for 3D beam steering on a custom confocal setup.