Piezoelektrik aktüatör tabanlı tarayıcı teknik tasarımı ve simülasyonu

Microelectromechanical systems (MEMS), offers compact and tailored solutions for a wide variety of applications such as laser beam guidance, tomography, microfluidic control, laser-based displays, LIDAR. These advantages of MEMS technology are important for the efficiency of the designed systems. This thesis aims to develop a scanner with high scanning frequency and scanning angle moved by a PZT-4 thin film. Our thesis focuses on optimizing the designed system using finite element model- ing. With this modeling, the movements resulting from the electrical input applied to the PZT-based actuator are evaluated. Additionally, with finite element modeling, the stress distribution on the system and its natural mode oscillations are examined. In out-of-phase motion, the system was operated with 100V at a mechanical res- onance frequency of 91 kHz. In-phase movement is at 208 Hz levels. This movement adds depth to the scan. Under these operating conditions, a scanning angle of 12.5 degrees is achieved. The width of the mirror is made is 0.66 mm. Mechanical defor- mations occur as a result of the system operating at high frequency. The theoretical calculation shows that 70 % of the existing mirror surface can be used efficiently. According to theoretical calculations, the power consumption of the system is around 1.5 mW. The designed system is intended to be used in applications where speed is needed, such as laser projectors and medical applications.