The synthesis and characterization of 2D Mo2C crystals and 2D Mo2C/graphene heterostructures on copper via chemical vapor deposition

Two dimensional (2D) nanomaterials have been extensively investigated because of their intriguining properties and their potential to revolutionize current technologies. The last family member of 2D materials is the 2D transition metal carbides (TMCs), and as an inportant member of 2D TMCs, 2D Mo2C, attracts wide interest in electronic and electrochemical applications due to its superconductivity behavior and ability to change its oxidation state. The success of 2D Mo2C in these application is based on the development of suitable synthesis methods. One of the most versatile methods for large area and less defective 2D Mo2C crystal growth is the chemical vapor deposition (CVD). In this study, 2D Mo2C crystal and 2D Mo2C/graphene heterostructure formation was studied on copper via CVD with the goals to better understand the mechanism of 2D Mo2C crystal formation and to determine the conditions for the synthesis of desired crystals. With respect to that the effects of processing parameters (Cu thickness, growth temperature and duration, gas flow rates and reactor pressure) on the grown structures' morphology (thickness, lateral size and composition) have been studied in detail by using Optical Microscope (OM), Scanning Electron Microscope (SEM, EDAX), Raman Spectroscopy, X-ray Photoelectron Spectroscopy (XPS), Atomic Force Microscopy (AFM), Electron Backscatter Diffraction (EBSD) and X-ray Diffraction (XRD) and the results have been compared and discussed.