Deposition of AlSiN-AlSiO coatings, investigation of structural and tribological properties

The aim of this study is to produce AlSiN and AlSiO coatings using sputtering technique and to investigate their structural, mechanical and tribological properties. In the coating process, 5%, 10%, 15% nitrogen and oxygen gases were used for AlSiN and AlSiO coatings. AlSiN(5%, 10%, 15% Nitrogen) and AlSiO(5%, 10%, 15% Oxygen) multi-layer coatings were made on AISI D2 steel base materials. It was determined that the films were in amorphous structure when they were first produced. To obtain a crystal structure, heat treatment is required. Heat treatment was carried out at 550°C for 2 hours to crystallize the AlSiN(5%, 10%, 15% Nitrogen) and AlSiO(5%, 10%, 15% Oxygen) coatings. XRD, abrasion test, heat treatments, Knoop microhardness tester, 3D Profilometer, SEM and EDS analyzes were performed to determine the tribological, structural and mechanical properties of the films. Comparisons were made with the data obtained as a result of the experiments as 5% Nitrogen - Oxygen, 10% Nitrogen - Oxygen, 15% Nitrogen - Oxygen in AlSiN - AlSiO coatings. The coatings obtained with 5%, 10%, 15% Nitrogen and similarly 5%, 10%, 15% Oxygen were also compared among themselves. It was determined that the highest hardness value was 595 HK and the lowest friction coefficient was 0.47. In addition, 7.85x〖10〗^(-5) value was obtained for the lowest wear rate.