Fabrication and characterization of temperature sensors
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Abstract (EN)
Temperature is the most frequently measured environmental value. Because physical, electronic, chemical, mechanical and biological systems are affected by temperature. For this reason, it is important to measure the temperature and keep it at certain values in the control systems. Using highly expensive materials such as platinum, the sensors made are really difficult to produce according to the desired resistance value. Therefore, lithography masks prepared for the temperature sensors to be produced gain importance. Especially, in the production stages of platinum temperature sensors, chemical etching can be quite difficult; Therefore, you need to design smart masks to control production stages. Hence, when you prepare a mask, the points called trimming will make it easier for you to adjust the resistance you want to set. So , Resistors are normally fabricated to lower resistance value than needed trimmed by cutting holes in them with lasers to increase their resistance value
Author
Ramazan Lök
Institution
How to Cite
Ramazan Lök (Doctorate thesis). Fabrication and characterization of temperature sensors, 2022, Bolu Abant İzzet Baysal University.
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