The synthesis and characterization of two dimensional metal carbides on different metal substrates via chemical vapor deposition

Two-dimensional (2D) Transition Metal Carbides (TMCs) draw attention in many applications, especially in advanced electronics, due to their physical and chemical properties. In order for these materials to be used in practice, they must be produced in a controlled and reproducible manner. Within the scope of this thesis, it is aimed to develop a cost-effective, scalable, and reproducible chemical vapor deposition (CVD) based process for the controlled, large lateral size, high quality production of 2D TMCs. In this context, the effects of CVD process parameters such as the reaction temperature and time; the catalyst presence, type and the amount of catalyst on the grown 2D Mo2C are investigated with detailed characterization studies (Scanning Electron Microscope (SEM), Transmission Electron Microscope (TEM), Raman Spectroscopy, Atomic Force Microscope (AFM), Optical Microscope (OM), X-Ray Spectroscopy (XPS), X-Ray Diffraction (XRD), Energy Dispersion Spectrometer (EDS)). Thus, with the completed studies, the effect of the processing parameters on the formed crystal structure was examined and besides the studies on the establishment of the relationship between the process and the structure; calculations related to kinetics and activation energy for controlled synthesis were implemented; the dominant mechanisms for the formation and growth of these crystals have been determined. In this context, it is thought that the completed study will make an important contribution to the understanding of the augmentation of 2D TMCs with the CVD method and to the field of 2D materials in general.