Baskı devre üzerine tümleşik elektromanyetik tahrikli optik mikro-mekatronik sistemler

In this research FR4, most commonly used printed-circuit-board (PCB) material, is explored for the first time as a new material and integration platform for miniaturized optical, electronic, and mechatronic devices and systems. The results of this investigation have been very fruitful, leading to several novel concepts and intellectual property in this area.One of the main avenues explored is laser scanning: an FR4 scanner with dynamic focusing feature is designed and demonstrated. Laser scanners are optical devices that manipulate the light beam direction using rotating mirrors or refractive elements, with applications in high resolution display and imaging systems, optical microscopy, barcode reading and laser printing. Dynamic focusing significantly extends the depth-of-focus of laser scanners without compromising the scanner resolution, which cannot be achieved with conventional passive optics. The designed opto-electro-mechanical system comprises a laser diode mounted on a vibrating arm, a rotating platform incorporating a focusing lens, actuators and electronics. The degree of integration demonstrated is not achievable with such ease at low-cost with other technologies. Scan angle greater than 50 degrees and laser plunger deflection greater than 500 ?m is achieved at around 50Hz resonant frequency.One of the major contributions of this thesis is on electromagnetic actuator design and magnetic modeling. Three different types of electromagnetic actuators are analyzed and compared in performance: (i) moving magnet actuators and associated back-emf position sensors, (ii) moving magnetic film actuators, where the developed thin-film magnetic model is valid for non-uniform fields for both saturated and unsaturated material cases and accounts for the magnetic hysteresis using a new closed form analytical expression, (iii) moving coil Lorentz force actuators.