Çok yüksek frekanslı uygulamalar için yüksek kalite faktörlü mikromekanik rezonatörler ve filtreler

Recent progresses in Radio Frequency Micro Electro Mechanical Sensors (RFMEMS) area have shown promising results to replace the off-chip High-Q macroscopicmechanical components that are widely used in the communication technology.Vibrating micromechanical silicon resonators have already shown qualityfactors (Q) over 10,000 at radio frequencies. Micromechanical filters and oscillatorshave been fabricated based on the high-Q micro-resonator blocks. Their fabricationprocesses are compatible with CMOS technology. Therefore, producingfully monolithic transceivers can be possible by fabricating the micromechanicalcomponents on the integrated circuits. In this work, we examine the generalcharacteristics of micromechanical resonators and propose a novel low loss resonatortype and a promising filter prototype. High frequency micromechanicalcomponents suffer from the anchor loss which limit the quality factor of thesedevices. We have developed a novel technique to reduce the anchor loss in extensionalmode resonators. Fabrication processes of the suggested structures arerelatively easy with respect to the current high-Q equivalents. The anchor loss reduction technique does not introduce extra complexities to be implemented in the existing structures.