Elektrostatik tahrikli mikro-tarayıcıların tasarımı, modellenmesi ve karakterize edilmesi

ABSTRACT Microscanners produced using MEMS technology enable light manipulation at a size, precision, and speed that is far beyond the limits of conventional machining. Microscanners that utilize ID, 2D, and even 3D scanning are gaining popularity and have found many applications in display, imaging, and telecommunication applications. Accurate modeling, effective testing and characterization of dynamic behavior of these devices are becoming increasingly important to reduce the design time and cost while optimizing performance. This thesis focuses on developing new modeling and experimental characterization techniques for torsional microscanners that are energized using an array of parallel-plate electrostatic actuators called comb-actuators. Models developed in the thesis are then applied to design a novel Fourier Transform Spectrometer (FTS) based on a tunable rectangular diffraction grating, which is formed using an out-of-plane comb-actuator. Major accomplishments of this research include (a) development of numerical models for analysis of hysteretic frequency response, parametric and subharmonic resonances, damping effects, and stability regions of comb-driven microscanners; (b) development of analytical models for predicting nonlinear system characteristics listed in (a) under small harmonic excitation condition; (c) development of experimental setups for microscanner characterization and validation of numerical and analytical models. Keywords: Microscanner, comb actuator, parametric resonance, numerical modeling, analytical modeling IV