Endoskopik görüntüleme ve yüksek çözünürlüklü görüntü sistemleri için elektrostatik MEMS tahrikleyiciler

Laser scanning utilizing Micro-Electro-Mechanical-Systems (MEMS) mirrors is used in many display and imaging applications. These systems utilize mirrors to steer the beam and thus require beam folding. There are applications, such as the forward-looking endoscopic imaging probe, where the system needs to fit in a tiny tube. Beam steering with cascaded Micro Lens Arrays (MLAs) require only small lateral displacements to achieve high angular beam steering. In that sense, beam steering with MLAs integrated MEMS propose a new solution to a forward-looking endoscopic imaging probe.In the first main part of this thesis, a novel 2 degree-of-freedom(DOF) MEMS stage with one uniaxial set of comb fingers is presented. Mechanical design progress, microfabrication results and characterization of both only 2D MEMS stages and MLA integrated 2D MEMS stages are presented in the first part of thesis. With 1.1mm x1.1mm MLA integrated device, 124 µm out-of-plane deflection is achieved with an applied voltage of 100 Volt in resonance frequency and 34 µm in-plane deflection is achieved with an applied voltage of 57 Volt again in resonance frequency.In the second main part of the thesis, a novel comb actuated torsional MEMS scanner utilizing indirect drive method is presented. Electrostatic MEMS scanners meet the requirements of high frequency scan speed, large scan angle, and low power consumption. With an applied voltage of 298 Volt, 26.7º Total Optical Scan Angle (TOSA) is obtained at resonance in ambient conditions, where in vacuum TOSA of 36.18º is achieved with an applied voltage of 113 Volt again in resonance.