Lazer ekranlar için elektrostatik ve piezoelektrik MEMS tarayıcı geliştirme

Laser based displays have been under development over the last 50 years but commercial viability of the technology was limited mainly due to the large size and high cost of laser sources and scanners. The quest for miniaturization and higher efficiency is realized with the development of directly modulatable laser diodes and scanning mirrors based on micro electro mechanical systems (MEMS) technology. Integration of scanners and laser diodes offers a powerful combination for micro-display and imaging applications such as laser printers, barcode readers, and wearable micro-display systems.A displayed image is formed pixel by pixel using a mirror producing angular motion that scans a modulated light beam on a screen. The purpose of this thesis is to develop new MEMS two dimensional raster scanners for laser display applications.For the slow axis of the two-mirror display engine, an electrostatically actuated rotary scanner is conceived and developed to provide a linear ramp scan at 60 Hz. A novel spring design is proposed for linear in-plane rotary MEMS scanner. It offers over 98% linear motion up to 7 deg. mechanical rotation with the novel suspension design.For the fast axis, piezoelectric actuation that requires much lower voltages than electrostatic actuation is used to develop a high frequency resonant torsional MEMS scanner. Sinusoidal actuation with 24 V at a mechanical resonance frequency of 40 kHz provides a total optical scan angle of 38.5 deg. for the 1.4 mm wide mirror. It exceeds the performance specifications cited in the current literature and becomes a significant step towards achieving Full HD (1080p) resolution with mobile laser projectors.