MEMS yapılarının dinamik karakterizasyonu ve modal özelliklerinin modifikasyonu

Micro Electro Mechanical Systems (MEMS) have found many application areas in different disciplines and took their place among the most promising technologies. The performance of such systems is primarily related to their dynamical characteristics. This study presents the dynamic characterization techniques that are used to identify the modal parameters of a MEMS device and the methods that can be implemented to change its dynamic response. Two distinct microscanners were chosen as the case study to demonstrate the developed methodologies. Initially, the microscanners were characterized using experimental modal analysis techniques to obtain frequency response function, modal damping, resonance frequencies, and mode shapes. Then, velocity and position feedback control loops were introduced to the scanner system to alter the damping characteristics and the resonance frequencies of the structure.A closed-loop Simulink model of the scanners is developed to verify the experimental measurements. Several curve fitting methods are used in order to have an accurate representation of the scanner system. Using the model, the influence of both position and velocity feedback on the effective damping, resonance frequency and the transient behavior of the scanners is investigated. The stability limits of the scanners under velocity feedback are also studied via numerical simulations.Based on the experimental and simulation results, the methodology developed in this study proves itself to be very efficient to alter the dynamical characteristics of the MEMS structures and it can be easily adapted to other MEMS applications.