Mikro-elektro-mekanik sistem tasarımında model doğrulama ve performans analizleri

Micro Electro Mechanical Systems (MEMS) are among the new and emergingtechnologies of the future and have many applications in different disciplines. Predicting theperformance of such systems early in the design process can significantly impact the designcost and also improve the quality of the design. This thesis presents the model validation anddesign methodologies developed to predict the performance of the micro systems. A two-dimensional micro scanner mirror was chosen as the case study to demonstrate the developedmethodologies. The model validation methodology includes the verification of the finiteelement model using an experimental modal analysis setup for measuring the out-of-planevibrations of the micro devices. The setup includes a laser doppler vibrometer (LDV) that isused to pick up signals without contacting the micro structure. An experimental procedurewas developed to collect the vibration data and then the data were processed by usingMATLAB and modal analysis software ME?scope. The finite element analysis andexperimental results were compared to identify the inaccuracies in the modeling assumptions.Validated finite element model was used to obtain the state space representation of themicroscanner mirror to proceed further with additional design studies. The state space modelwas used for disturbance analysis which was performed using Lyapunov approach to obtainroot mean square (RMS) values of the mirror rotation angle under the effect of a disturbancetorque. The disturbance analysis framework was combined with the sensitivity analysis todetermine the critical design parameters for improving the system performance. In addition tothe disturbance sensitivity analysis, modal sensitivities of the design parameters were alsoinvestigated. This analysis was conducted by perturbing the design parameters andinvestigating the change in the modal frequencies.Another study that was conducted in this thesis was the prediction of the modalfrequencies of the micro device using analytical formulations. Although this analysis is veryspecific to the micro device used in this thesis, it may provide valuable information to theengineer at the initial design stage especially when high frequency requirements andseparation of vibration modes are very critical.1The in-plane vibration setup and the measurement procedure is also explained in thisthesis for completeness. However, the results of the in-plane measurements are not availablecurrently and left for a future work.2