Mikromekanik bir çınlacın manyetik devinim ve mekanik gerilme tabanlı akordu

The principle attribute of mechanical resonators is ruled by their resonance frequencies. As the main components of resonating Micro- and Nanoelectromechanical Systems (MEMS and NEMS), mechanical resonators determine the sensitivity, accuracy, and operation range. Therefore the tuning capability of such systems is crucial for design and development of NEMS and MEMS. In this study, a transversally and axially tunable microresonator is fabricated and studied. Magnetomotive actuation and optical read-out techniques are employed to excite microresonator and measure the output. Two active tuning mechanisms, magnetomotive tuning and tension-based tuning, are used to tune the resonance frequency of the micromechanical resonator. A chip-bending method is introduced to realize tension–based tuning mechanism. The variation in the effective stiffness of the micromechanical resonator due to softening effect and hardening effect is investigated. The resonance frequency is tuned in the range of -13% with the magnetomotive tuning mechanism and the resonator exhibits a resonance frequency shift from 789 kHz to 683 kHz. The resonance frequency tuning range for chip-bending method is found to be 8%, from 789 kHz to 854 kHz. Simultaneous use of both techniques results in minor deviations from the aforementioned values. The combination of both tuning mechanisms represents one of the few examples in the literature. The approach is especially promising for use in sensor and RF filter applications.