Mikrometre boyutlarda üretilmiş mekanik çınlaçların üretim ve karaterizasyonu

Micromachined mechanical resonators are of considerable interest because oftheir many important scientic and technological applications. They can be usedas a components of radio-frequency lters in communication systems, mechanicalelectrometer or magnetometer for sensitive detection of force, charge, pressure.This work is directed towards the fabrication and characterization of micro-electromechanical resonators, cantilevers and bridges. The SOI cantilever and thesilicon nitride cantilevers and bridges are fabricated by using surface microma-chining techniques. They are fabricated in the Advanced Research Laboratory ofBilkent University. The center frequencies are ranging from 20 kHz to 270 kHz.The characterization of cantilevers and bridges are done by using the beam deec-tion method and the ber optic interferometer method. The dynamic responseof the rst devices, such as the resonance frequencies and the quality factors willbe reported. In addition, simple beam theory and some fundamental loss mecha-nisms will be discussed. The experimental results will also be compared with thetheoretical ones.Keywords: Resonators, Cantilever, Bridge, Quality Factor, Laser Beam Deec-tion, Fiber Optic Interferometer.iii