Silisyum mikroyuvarlardaki elastik saçılmada yüksek kalite faktörlü optik çınlamalar

The whispering gallery modes resonators have received increased attention as novel structures, which are suitable for various applications in linear, nonlinear and quantum optics. Small mode volumes and high optical quality factors are unique features of these resonators. These properties make possible high concentration of optical fields and relatively long photon confinement times. The spherical cavities confine light by total internal reflection at the inner surface boundary. In this study, elastic light scattering intensity calculations at 90o and 0o for the transverse electric and transverse magnetic polarized light were performed at 1200 nm for a 50 micrometer radius and 3.5 refractive index silicon microsphere. The mode spacing between morphology dependent resonances was found to be 1.76 nm. The linewidth of the morphology dependent resonances was observed to be on the order of 1E-02, which leads to a quality factor on the order of 1E+05. Experimentally, high quality factor optical resonances are obtained in the elastic scattering spectra from a silicon microsphere with a radius of 500 micrometer and refractive index of 3.48. The mode spacing between morphology dependent resonances was found to be 0.27 nm. The linewidths of the resonances were found to be of the order 1E-04 nm, which leads to Q factors of 1E+06. As a result, silicon microspheres could be used as a resonant cavity enhanced optoelectronic devices for near infrared wavelength region as well as other application in linear, nonlinear and quantum optics.