Spektroskopi ve lazer tarama sistemleri için MEMS tarayıcı geliştirilmesi

Two novel methods are developed for Fourier transform spectroscopy (FTS) and laser scanned display and imaging based on electrostatic comb actuated micro-electro-mechanical system (MEMS) components. Construction of fully functional system demonstrators, in addition to the design, fabrication and characterization of novel optical MEMS components is also presented.Infrared (IR) absorption spectroscopy is an established method for the detection and analysis of chemical and biological samples, and used extensively in a wide range of industrial and research oriented applications. Fourier transform spectroscopy (FTS) is one of the numerous IR spectroscopy techniques, distinguished by its unprecedented spectral discrimination paired with the inherent sensitivity, due to its throughput and multiplex advantages providing higher SNR and speed compared to other conventional methods like grating or Fabry-Perot spectrometers. The FTS method developed in this thesis employs a miromachined out-of-plane resonant mode comb-actuator simultaneously utilized for actuation, light dispersion, and optical path difference monitoring. The fundamental advantages offered by the proposed MEMS spectrometer system over the existing Fourier spectrometers are simplicity and compactness, good light efficiency (wide clear aperture), ease of fabrication and straightforward system integration capability.Laser scanning is a key technology behind many modern high resolution display and imaging systems. Through the single source-single detector approach, laser scanning can significantly reduce the cost and the complexity of demanding applications, which traditionally employ costly detector arrays, and inefficient flood illuminators. Furthermore, fields like medical imaging diagnostics and measurement technology have increasing demand on compact and high performance imagers. Hence, miniaturization of high resolution scanning systems is crucial. A novel microlens array based high-resolution laser scanning architecture and its implementation using comb actuated MEMS translation stages are proposed. The scanning architecture consists of four cascaded micro-optical elements (1 microlens and 3 microlens arrays (MLA)), where the lens and one of the MLAs are laterally moving. The novel device proposed here will enable precision alignment and scanning of the micro-optical components through integrated fabrication of polymer micro-optics on silicon micro-mechanics.