Taraklı erişim düzeneği ve mekanik bağlaşım prensibi ile sürülen MEMS tarayıcılar

MEMS microscanners are used to guide or manipulate the light beams more precisely and faster than conventional scanners. Microscanners are mostly used in display, imaging, telecommunication and barcode recognition applications.In this thesis, a new actuation mechanism using mechanical coupling is demonstrated to increase the efficiency of the comb-drive MEMS scanners and provides large resonant deflections at low voltages. An additional outer frame is defined around the scanner and the comb actuators are presented only on the outer frame. At the mechanical coupling frequency of the 2-DoF (Degree- of- freedom) system, which is mainly defined by the stiffness of the scanner flexures and the scanner geometry, the deflection of the outer frame coupled to the scanner with a mechanical coupling efficiency (coupling gain). The main advantage of this system is that, a small electrostatic force generated in the comb fingers is sufficient to achieve large scanner deflections in comparison to 1-DoF systems. Moreover, this method is applicable to eliminate the pull-in limitation in the linear scanners and reduce the sliding film damping of the comb fingers on the torsional scanners.The mechanical coupling efficiency and the mechanical coupling frequency formulae are derived analytically. To optimize the system for maximum deflection, numerical analysis of the mechanical coupling efficiency is performed, as well. Different linear and torsional scanners are designed and fabricated in this work using SOI fabrication techniques. In addition, designs are tested to validate the mechanical coupling mechanism.In the second part of the thesis, a maskless laser writing system is developed for making polymer waveguides and other optical structures integrated with mechanical structures.