Tarama uygulamaları için polimer manyetik tahrikleyici tasarımı ve üretimi

Thesis Title : Design and Fabrication of Polymer MagneticActuators for ScanningAbstractThis thesis mainly deals with the design and development of resonant laser scanners with asimple and low-cost fabrication process using molded polymers and electroplated magnetic films.The polymer magnetic scanners described here are used in a prototype barcode reading systemand the performance proved to be adequate for certain 1D and 2D imaging applications. Mostimportant contributions of this work are (1) the development of a simple and low-cost fabricationprocess using polymers and electroplated magnetic materials, (2) the design and modeling ofnovel dynamic-actuation methods with magnetic materials for 1D and 2D laser scanning.Two types of scanners were designed for this work: cantilever beam scanners and torsionalscanners. Unlike micromachined scanners, the present process does not require clean roomenvironment and photolithography steps. Polymers are molded or cut into desired shape and usedas scanning mirrors. Different types of self-curing or UV-curing polymers are tested as structuralmaterial. Good results are obtained with UV-curing polymer, typically used for stereo-lithography, and the copper coated epoxy used in printed circuit boards (PCB). One side of thepolymer is either coated with Aluminum (Al) or Al-coated Silicon mirror is attached to thescanner for high reflectivity and good mirror surface quality. Magnetism is introduced to thestructural material in two different ways (1) mixing magnetic particles in powder form into thepolymer, (2) electroplating permalloy (Ni80Fe20) magnetic film underneath the polymer.Resonant-mode dynamic actuation is obtained by applying a time-varying current to an externalcoil. For a given magnetic field, magnetic forces obtained with the electroplated scanners arehigher than the forces obtained with the magnetic particles. Deposition of permalloy (80% nickeland 20% iron) magnetic thin films is performed in our plating facilities.Another contribution of this work is in modeling and optimization of the magnetic actuationusing electroplated thin films in both saturated and unsaturated modes of operation. This workfocuses on small-angle rotations of the scanner. The effects of coil parameters on the materialmagnetization and the hysteresis of the magnetic force on the scanner dynamics are discussed. Itis concluded that the radial and vertical components of the magnetic field and the shapeanisotropy in thin magnetic films are important factors in determining the material magnetizationdirection and the magnetic forces. The prototype devices are tested using static and dynamicmethods and the experimental results validated our finite element modeling and theoreticalresults. Lastly a barcode reading system is demonstrated using the developed scanners and met allthe performance requirements for typical 1D barcodes.Advisor: Assoc. Prof. Hakan Ürey Date:Director: Prof. Dr. Yaman Arkun Date: