Üst üste yerleştirilmiş silisyum nanotel dizilerinin bağlaşımlı çınlaçlar olarak tasarımı ve elektromekanik modellemesi

Mechanical resonators are widely used for timekeeping and frequency synthesizing purposes in electronic circuits. Quartz resonators have satisfying performance characteristics like low phase noise and thermal stability. However, micro electromechanical systems (MEMS) resonators are suitable candidates to replace these resonators because of their small size, low power dissipation and relatively low cost due to batch fabrication. For this reason, MEMS resonators have taken part in resonator industry for two decades. Although MEMS resonators are viable candidates, they require further engineering of specifications to match their quartz counterparts. Enhancing the device specification to compete with quartz devices is an intense research subject in the MEMS field.One of the most important challenges in capacitively transduced micro/nanoresonators is the reduction of the read out signal due to small sizes. In the literature, arraying i.e., summing the outputs of identical resonators was used for increasing the signal for MEMS resonators. For the generation of one mode of vibration from non-identical resonators, mechanical coupling is used. The mechanical resonators at the same plane are placed side by side and connected through mechanical structures, to achieve mechanical coupling.In this thesis, a novel approach in mechanical coupling was demonstrated for nanowire array resonators, where signal reduction problem becomes more severe. Silicon nanowire (SiNW) resonators, which are vertically arrayed with respect to the substrate, are demonstrated. The mechanical coupling of these nanoresonators is achieved by thin membranes connecting nanowires at both ends. These nanowires are below 50nm in diameter and a few micrometers in length, thus typically generating an operation in high frequency (HF, 3-30MHz), very high frequency (VHF, 30-300MHz) and even in ultra-high frequency (UHF,300MHz-3GHz) ranges of radio frequency (RF) spectrum.SiNW array resonators were modeled using equivalent electrical circuits. Electromechanical direct analogy for bending mode clamped-clamped beams was studied to convert mechanical properties into electrical RLC equivalents. Moreover, a modeling procedure related to vertical arraying and mechanical coupling is also demonstrated.Characterization of SiNWs fabricated by Bosch process was also investigated by fabrication test runs. The outputs of fabrication efforts were directly used as design specifications and fabrication limitations for the modeling of SiNW array resonators. Furthermore, a full fabrication process including metal electrode formation is also proposed for existing fabrication capabilities.As a result of these design, fabrication and modeling efforts, some ubiquitous geometries available for fabrication and measurement were determined. Fabrication limitations and need for detectable signals were taken into consideration for designing these geometries.