Uyarlanır q-kontrol tekniği ve piezo-elektrik tahrikli bir prob sayesinde nano boyutlardaki yüzeylerin taranması

A new approach, called Adaptive Q-control, for tapping-mode Atomic ForceMicroscopy (AFM) is introduced and implemented on a home-made AFM set-uputilizing a Laser Doppler Vibrometer (LDV) and a piezo-actuated bimorph probe.In the standard Q-control, the effective Q-factor of the scanning probe is set priorto the scanning depending on the application. However, there is a trade-off inchoosing the effective Q-factor of an AFM probe. The Q-factor is either increasedto reduce the tapping forces or decreased to maximize the scan speed.Achieving these two benefits simultaneously using the standard Q-control is notpossible. In adaptive Q-control, the Q-factor of the probe is set to a value initiallyas in standard Q-control, but then modified on the fly during scanning whennecessary. In this paper, we present the basic theory behind the adaptive Q-control, the electronics enabling on-line modification of the effective Q-factor ofthe piezo-actuated probe, and the results of the scanning experiments comparingthree different methods: a) without Q-control, b) with the standard Q-control, andc) with the adaptive Q-control. The results show that the performance of theadaptive Q-control is superior to the other two methods.