Robust control of MEMS gyroscopes

Gyroscopes are devices using turning movement to balance for detection of direction and calculation of speed. Over the years, with advances in technology gyroscopes have been developed that built with smaller size Micro Electro-Mechanical Systems (MEMS). In this thesis study, various control methods for tracking sinusoidal trajectories of z-axis and triaxial MEMS gyroscopes have been investigated. With mathematical models obtained from z-axis and triaxial MEMS gyroscope dynamic models both systems are modeled in Matlab/Simulink environment. Based on the block diagrams generated, the system have been inspected by the PID controller and the KKK based control method inspired by the Sliding Mode Control (KKK). These control methods enable to follow the desired sinusoidal references with z-axis and triaxial MEMS gyroscopes. The results obtained by both control methods are presented in the thesis. In this study, it was aimed to create a ground for future work which is aimed to for a MEMS gyroscope orbit follow the desired sinusoidal trajectory.