Analytical modeling of multilayer diaphragm type piezoelectric actuator

In this study, the effects of parameters such as voltage, uniform fluid pressure, geometric properties and mechanical properties, which affect the operating performance of the multilayer circular diaphragm type piezoelectric actuator used in micro-pump actuation, on the transverse deflection behavior were investigated by analytical method and finite element method. Classical laminated plate theory (CLPT) based on Kirchoff thin plate theory was used in analytical modeling studies. The mathematical model, which is the solution of the high-order inhomogeneous static deflection equation of the actuator, has been found to depend on the applied voltage and pressure load, as well as geometric properties and material properties. In addition, numerical analysis was performed to compare the results obtained. A finite element model was created by defining the piezoelectric ceramic layer-electric interaction under applied voltage load, passive silicon layer-fluid interaction under uniform fluid pressure, and plate boundary conditions. According to the results obtained in the study, it was concluded that the parameters on which the deflection performance of the multilayer circular unimorph (single direction driven) piezoelectric actuator, which is clamped at the edges, depend on the voltage, fluid pressure, geometric properties and material properties. As a result of the results obtained from the transverse deflection plots drawn according to the static deflection data, deflection performance increased with maximum voltage and low fluid pressure under operating conditions. In addition to the minimum layer thicknesses, maximum piezoelectric layer radius and minimum passive layer radius also improved the deflection behavior. Also, in terms of layer stiffnesses, the increase in the stiffness of the other layers, except for the active piezoelectric layer stiffness, adversely affected the deflection performance. The data obtained as a result of the finite element analysis showed good agreement with the data obtained as a result of analytical modeling and can be used as an alternative way to be preferred for this type of modelling.