Elektrostatik hareket prensibi ile çalışan nano cımbızların tasarımı ve yönlendirilmiş kendinden birleşme metodu ile üretimi

Nano-Electro-Mechanical Systems (NEMS) with nano-scale end-effectors, whichare capable of interacting with objects with nano-metric precision, have manyapplications in nano-science and technology. Among these, nanotweezers havea significant importance, which enable handling and manipulation of nano-scaleobjects such as DNA molecules, carbon nanotubes, nanowires and nanoparticles.This M.S. thesis deals with the design and fabrication of electrostatically actuatednanotweezers with nanowire end-effectors fabricated by guided self-assembly.Primary aim is achieving the integration of nanowires into microelectronics in asingle batch process, reducing process complexity and enabling possible designvariations. Secondary aim is the design of an actuation mechanism with nano-scale end-effectors and providing a high-precision control.Major accomplishments of this research can be listed as (1) optimization of theelectro-deposition process for nanowire fabrication by guided self-assembly, (2)design and analysis of an electrostatically driven comb actuation mechanism forthe nanotweezers, (3) design and analysis of an alternative thermal actuationmechanism for the nanotweezers and (4) fabrication of the nanotweezers in theDepartment of Micro and Nanotechnology (MIC) at Technical University ofDenmark (DTU), in Copenhagen and mechanical testing and characterization ofnanotweezers again at MIC and Koç University (KU) cleanroom facilities.