Investigation of electro-mechanical factors effecting micro-pump characteristics for biomedical applications

In the past few decades, the advances in micro-electro-mechanical systems (MEMS) technologies have contributed to the rapid development of microfluidic devices in various functions. One of the important elements on MEMS is the micro-pump, which is capable of producing flow rates ranging in milliliter (ml) or microliter (μl) per minute. A commercial micro-pump should provide properties that justify the simple structure and miniaturization, high reliability, simple working principle, low cost and no need for complex controller. In this study, two novel piezoelectric actuated (lead zirconate titanate-PZT) valveless micro-pumps that can achieve high flow rates by pumping chambers and fixed reservoirs were designed and fabricated. Extensive experiments were conducted to investigate the effects of hydrodynamic and electromechanical on flow rates of the Single Diaphragm Micro-pump (SDM) and the Bi-diaphragm Micro-pump (BDM). BDM had two actuators facing to the same chamber at 180-degree phase shift. The primary features of the proposed designs were the high flow rates at low driving voltages and frequencies with the help of innovative design geometry. 3D-printing technique providing one-step fabrication for integrated micro-pumps with fixed reservoir was used. The micro-pump materials were biocompatible and can be used repeatedly to reduce costs. Mechanical parameters such as tensile test for silicon diaphragm, surface topography scanning by microscopy techniques and drop shape analysis for hydrophobic property were investigated to reveal surface wetting and flow stability. In addition, the effect of reservoir height was investigated and the calibration flow rates were measured during the inactive periods. The maximum diaphragm displacements were obtained at 45 V and 5 Hz. The maximum flow rate of SDM and BDM at 45 V and 20 Hz were 32.85 ml/min and 35.4 ml/min respectively. At all driving voltage and frequency levels, BDM had higher flow rates than of SDM.