Deposition of ZrN and Zr/ZrN coatings by the cathodic arc PVD method

In present time, in the name of the greater challenge in marketing, the goal of manufacturinglow cost materials and efficient productivity, and in the parallel of reducing raw materialsources, alternative processes, which are called surface technologies, that include theimprovements on the outer part of the material rather than the whole material, get greatimportance day by day. Beyond the traditional methods, generally nano-meter scaled,supreme performance coatings studied under the topic of thin film coatings. Thin nitride filmcoatings which are the sub-family of this type coatings have increased their importance afternineteen nineties.In this study we mentioned briefly the most common used thin nitride film coatings after thefacts of surface technologies and thin film coatings were disclosed. Thin nitride filmsapplication fields and expended market size mentioned that is based on sectors. Lastly, thevapor deposition technics which are the major processing methods of the thin film coatingsdescribed and then experimental studies are explained.In experimental studies, ZrN and Zr/ZrN coatings are deposited on to high speed steel andlow carboned steel sub-materials by using cathodic arc physical vapor deposition technic. TheX-ray diffraction analysies of the coatings performed and the phases of the structure andpreferred orientations are determined. To reveal the adhesion ability of the film onto sub-materials, which is one of the critic points of understanding the thin nitride films? supremeproperties, Rockwell-C indentation test is applied to films and comparisons with the otherrelated studies have beeen made. At last the coating thicknesses are calculated and the fracturesurfaces of the thin film coatings are examined in scanning elcectron microscobe.Keywords: Thin nitride film coatings, physical vapor deposition (PVD), chemical vapordeposition (CVD), ion plating, ZrN, Zr/ZrN.JURY:1. Asist. Prof. Dr. Nurhan CANSEVER (Supervisor) Date: 07.10.20052. Prof. Dr. Mustafa Ç Ğ DEM Page: 923. Asist. Prof. Dr. Seyfettin ERTURAN