Fabrıcatıon and characterızatıon of sıngle mode sılıcon on ınsulator optıcal waveguıde

The design, fabrication and characterization of silicon on insulator (SOI) single mode optical waveguide is presented in this thesis. SOI waveguide were designed by using analytical and numerical methods. The convenient geometry was determined for SOI waveguide to be fabricated. Single mode for SOI waveguide was obtained. Based on the result of design, single mode SOI waveguide were fabricated by using conventional optical lithographic methods. The insertion and propagation losses of waveguide were measured by using conventional cut-back method. The insertion loss of SOI waveguide is 4.9 dB for TE and TM modes. The propagation losses of single mode SOI waveguide are 2.5 dB/mm and 2.8 dB/mm for TE and TM modes respectively.