Production and optical properties of zinc nitride (Zn3N2) by pulsed filtered cathodic vacuum arc deposition system
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Abstract (EN)
In this work, Zn3N2 thin films were produced on glass and silicon substrates by Pulsed Filtered Cathodic Vacuum Arc Deposition Method at room temperature for the same thickness at different pressure and for different thickness at the same pressure. Furthermore, the influence of thickness and pressure on the optical and structural properties were investigated for the produced Zn3N2 thin films.
Author
Zeynep Baz
How to Cite
Zeynep Baz (Master Thesis). Production and optical properties of zinc nitride (Zn3N2) by pulsed filtered cathodic vacuum arc deposition system, 2008, Çukurova University, Fizik Bölümü.
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