Structure and properties of carbon films produced by filtered cathodic vacuum arc
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Abstract (EN)
In this study, carbon films were deposited on glass substrates by pulsed filtered cathodic vacuum arc deposition (PFCVAD). A high purity graphite rod was used as the carbon plasma source. For determination of best film production parameters, different source to substrate distance values tested. Also the vacuum and argon atmosphere is tried. Optical parameters determined by spectrometer , crystallographic properties by XRD spectrometer and topographical properties are determined by AFM.
Author
Merhan Kılıç
How to Cite
Merhan Kılıç (Master Thesis). Structure and properties of carbon films produced by filtered cathodic vacuum arc, 2017, Çukurova University.
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