Modeling and design of MEMS technology based DC/AC power inverter for renewable energy applications

Micro-electro-mechanical systems (MEMS) enable us to transform large-scale electronic devices into small-scale electronic devices. In this thesis, MEMS technology was applied to DC/AC inverters used in renewable energy applications. The main reason for using MEMS technology in renewable energy applications is to convert high efficiency DC voltage to AC voltage with low power consumption. While designing a capacitive MEMS DC/AC inverter in our thesis study, since the AC voltage used in the city grid is 50 Hz and 220V, the frequency is taken as 50 Hz in this study. In addition, the classical MEMS settlement area was preferred. The effects of MEMS comb structure, capacitance, electrostatic force, electrical potential and displacement on the inverter were investigated. Analyzes were made at 0.5V and 24V DC voltages and near-perfect voltage conversion was obtained. With the proposed power inverter, zero power consumption was achieved due to its capacitive feature. With this thesis, it was seen that DC/AC conversion is possible with low power applications. In future studies, by selecting suitable semiconductors, number of combs, comb length, appropriate input voltage and capacitance, high efficiency DC/AC inverter or electronic devices can be designed to apply MEMS technology.