The problem of selection with the axiomatic design of MEMS (micro electro-mechanical systems) based sensors in industry 4.0 predictive maintenance processes

The aim of this thesis study is to investigate the axiomatic design method of MEMS (Micro Electro-Mechanical System) based sensors in the field of nanoscience specific to the different parameters (sound, vibration, flow, etc.) of machines etc. Within the scope of the thesis study and afterwards, it is aimed to advance the literature review in a special R&D center, to carry out university-industry cooperation studies, to transform into an applied project with these studies and to test the appropriate MEMS-based sensor in the predictive maintenance processes of the companies. Conceptual research will be conducted to determine the most appropriate method (lithography etc.) used in the production of MEMS based sensors and shaping their design / modeling. After the modeling / patterning process, the dimensional and similar parameters of the sensor base / membrane will be optimized and the most suitable design will be selected by the axiomatic design method. Finally, it will be evaluated whether the choices made for MEMS-based sensors are also suitable for nano-scale NEMS (Nano Electro-Mechanical System) based sensors