Development of novel ZnO anode for Li-ion batteries by chemical vapour deposition (CVD) method

In recent years, the energy requirements is increasing correspondingly with the development of technology. Especially, great demand of using the mobile electronic instrument causes the requirement of rechargeable batteries. Concordantly research and development studies about Li-ion batteries which are safer, lighter and have the higher initial capacity are being done.In this study, ZnO coating which was done by the chemical vapor deposition (CVD) method was investigated as a novel anode material for Li-ion batteries enhancement. Zinc oxide was coated on the Si wafer substrate. Chemical vapor deposition experimental studies carried out at 200, 300 and 400 °C for 10, 20 and 30 minutes. O2 flow rates were 1, 3 and 5 L/min. As a starting material, zinc acetate dehydrates was used. Effects of temperature, time and flow rate on the micro structure, particle size, surface finish and conductivity were determined by scanning electron microscopy (SEM), Atomic force microscopy (AFM), X-Ray Diffraction (XRD) and 4-point probe resistivity.