Investigation of obtained surfaces by plasma immersion ion implantation and deposition (PIII&D)

Plasma immersion ion implantation and deposition that is developed in order to modify the mechanical and chemical surface properties of metals, use energetic particles (ions) which is implanted the near surface of materials. In PIIID, sample is immersed to plasma and exposed to negative high pulsed voltages. Ions (generally Nitrogen ions) are implanted to sample surface by accelerating ions through the electrical field. Most important advantage of PIIID is the simultaneously implantation at all sides of sample (except the surface of sample that is in contact with substrate holder). Due to the excellent properties of titanium and its alloys nowadays they are used many industries and commonly used in medical industry especially being the prosthesis material. Ti6Al4V alloy hasn't common usage in mechanical engineering because of having weak surface hardeness and wear resistance. In this thesis, the atomic force microscope (AFM), X-Ray photoelectron spectroscopy (XPS) and electrochemical corrosion resistance of surface and sub-surface layers of Ti6Al4V alloy that are treated by PIII&D method in Nitrogen plasma, are done. In consequence of the XPS analysis, it is determined that developing of zirconium layers which is increasing directly proportional with deposition voltage and process time at the surface of Ti6Al4V alloy. These layers are supported by AFM analysis. Electrochemical corrosion resistance behavior of this layer were examined.