Nitriding of nonferrous metals by plasma immersion ion implantation

Plasma immersion ion implantation that is developed in order to modify the mechanical and chemical surface properties of metals like conventional beam line ion implantation, use energetic particles (ions) which is implanted the near surface of materials. In PIII, sample is immersed to plasma and exposed to negative high pulsed voltages. Ions (generally N2 ions) are implanted to sample surface by accelerating ions through the electrical field. One of the most important advantages of PIII is the simultaneously implantation at all sides of sample (except the surface of sample that is in contact with substrate holder) without manipulation of sample and ion beam.Due to the excellent properties of titanium and its alloys nowadays they are used many industries and commonly used in medical industry especially being the prosthesis material. Ti6Al4V alloy hasn?t common usage in mechanical engineering because of having weak surface hardeness and wear resistance. In this thesis, the scanning electron microscope (SEM), X-Ray diffraction (XRD) and microstructure analysis and wear behavior of surface and sub-surface layers of Ti6Al4V alloy that are treated by PIII method in N2 plasma, are done.In consequence of the XRD analysis, it is determined that developing of TiN and Ti2N which is increasing directly proportional with temperature and process time at the surface of Ti6Al4V alloy. These layers are supported by SEM analysis and microstructure pictures. It is determined that the thickest layer develop in 12th experiment group which has maximum process temperature. In consequence of wear test done by pin-on disk wear machine, it is confirmed that increasing frequency and pulse time of PIII process improves wear resistance of Tİ6Al4V alloy.