The surface characterization with STM/AFM

n THE SURFACE CHARACTERIZATION WITH STM/AFM (M.Sc. Thesis) Demet USANMAZ GAZI UNIVERSITY INSTUTE OF SCIENCE AND TECHNOLOGY JUNE 2005 ABSTRACT In this work, we present the results of STM/AFM on the Si and AlGaAs surfaces. For Si(lll), we find the (7x7) surface reconstruction by analyzing the STM images. We also present the AFM results on the AlGaAs semiconductor material grown in our MBE laboratory. We have first etched this material by the chemical solution of NH4OH+H202+H20 (1:1:50). After that, we applied chemical solution of HF+H202+H20 (1:1:30) in the different time period. We determine the AFM images and surface roughness on this etched AlGaAs. Science Code : 223.23 Key Words : STM, AFM, AlGaAs, Si, Semiconductor Page Number: 72 Adviser : Assoc. Prof. Dr. Mehmet ÇAKMAK