A study on the mechanics of an electrically actuated micro cantilever beam switch

RF MEMS, which is becoming RF NEMS (Radio Frequency Nano Electro Mechanical Systems) nowadays via emergent science, are very important for communication technology. Therefore, minimizing the sizes is essential to achieve higher frequency, faster switching, lower actuation voltage and to enlarge application areas. In this thesis study, RF MEMS switches are briefly introduced. A relatively smaller metal to metal contact, series RF MEMS switch is designed and its mechanical parameters are investigated. A hole is used in design to reduce the stiffness. The distributed load that occurs on the designed beam due to the applied voltage is calculated. Deflection of the beam is determined using principles of mechanics. Hence, three types of stiffness are calculated. This calculation method is verified with a similar design that is taken from literature. Resonant frequency, pull-in voltage, hold-down voltage, switching time, release time, contact force and release force are studied and simulated. For release force calculation, two different approaches are discussed. Solution results and simulation results are compared with each other and the failure ratios are discussed. In addition to this, residual stress effect on the deflection is mentioned. Also a new approach is brought for pull_in voltage calculation and its flow-chart is given. For simulation MATLAB and Coventor software are used.