Investigation of structural, electrical and triboelectric properties of ZnO thin films

Technology advancements that enhance people's standard of living also lead to a rise in the need for energy. New electrical energy production mechanisms that address issues like waste energy and efficiency are being investigated by scientists as a means of meeting energy demands beyond the conventional methods and materials now in use. Triboelectric nanogenerators (TENG) are one example of a novel type of electrical energy generation mechanism that was invented in 2012. Most commonly, the electrodes in a TENG are polymer surfaces. Although the polymer structure can be easily manufactured, it cannot operate as expected because of its rapid deformation. It is believed that replacing polymers with semiconductors, which lose electrons more quickly, will improve efficiency in this regard. The present thesis resulted in the development of a zinc oxide (ZnO) semiconductor-based TENG that operates on the basis of the triboelectric effect. It was produced as a ZnO thin films on Si(100) substrates with sputtering powers of 40-100 W, pressures of 5-15 mTorr, partial oxygen concentrations of 5-15%, and film thicknesses of 5-100 nm. Its structural properties were determined by X-ray diffractionmeter (XRD), X-ray reflectometer (XRR), scanning electron microscope (SEM), atomic force microscope (AFM), and surface morphological properties; electrical properties were determined by resistance measurement system; and the films were produced using a magnetic field sputtering system and then heated under vacuum. Conversely, TENG's electrical outputs were achieved by modelling mechanical energy with a linear reciprocating motion generator whose triboelectric characteristics were engineered and manufactured in the lab. The thin films XRD patterns and scanning electron microscope (SEM) showed the desired wurtzite structure and homogeneity. The 100 nm thin layer had the best electrical measuring results. Thin films with a thickness of 100 nm were heated in an oven. As the electrode, we used copper (Cu) and polyethylene terephthalate (PET) - indium tin oxide (ITO). Triboelectric measurements of the films were taken at room temperature and after heat treatment. The developed TENGs produced the highest voltage of ~70 V and the current value of ~5,36 μA. The results obtained were found to be consistent with the existing literature.