Metal ion implantations into ZnO crystals

METAL ION IMPLANTATIONS INTO ZnO CRYTALS SUMMARY Key words: ZnO crystal, ion implantation, range, nuklear stopping. Ion implantation is one of the simplest methods for modifying the surface properties of materials. Since it has some technological merits, i.e. providing easy control of depth and concentrations of implants, it has found many applications in science for the last few decades. This method provides a way of inserting any desired element into the structure as trace impurities by appropriate selection of its energy and dose. Ion implantation has several effects on many physical aspects. It can not only change the mechanical and/or chemical properties but it is also used to modify the elektrical and optical properties of materials. SRIM is a group programs which calculate the stopping and range of ions (10 eV- 2 GeV/akb) into matter using a full quantum mechanical treatment of ion-atom collision. IX