Electrical conductivity and changing with thermal operation of ZnO which growth by pulsed cathodic vacuum arc deposition

ABSTRACTMSc THESISELECTRICAL CONDUCTIVITY AND CHANGING WITH THERMALOPERATION OF ZnO WHICH GROWTH BY PULSED CATHODICVACUUM ARC DEPOSITIONMediha SOYLUDEPARTMENT OF PHYSICSINSTITUTE OF NATUREL AND APPLIED SCIENCESUNIVERSITY OF ÇUKUROVASupervizor : Assoc. Prof. Şadi YILMAZYear : 2006, Pages: 115Jury : Assoc. Prof. Şadi YILMAZProf. Dr. Ramazan ESENAssis. Prof. Bilgehan GÜZELAs semiconductor ZnO thin films have high electrical conductivity andoptical permeability materials used in most position point of view technological.Because of this considers producting of the material and measuring of using point ofview technological.In this thesis studing has been investigated semiconductor ZnO thin films thatelectrical conductivity and changing with thermal operation. Thin films deposited onglass and Si substrates by PFCVAD deposition process using different O2 pressuresand at different thickness then compared and measured semiconductor parameterssuch as thermal electrical conductivity, absorption coefficient, energy band gap.Key Words: ZnO, Pulsed Filtered Cathodic Vacuum Arc Deposition(PFCVAD) process, electrical conductivity, thermal change.