Optical and structural properties of ZnO thin films which are grown by cathodic arc deposition
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Abstract (EN)
ABSTRACTMScOPTICAL AND STRUCTURAL PROPERTIES OF ZnO THIN FILMSWHICH ARE GROWN BY CATHODIC ARC DEPOSITIONMERYEM DERYA ÖZDEMİRDEPARTMENT OF PHYSICSINSTITUTE OF NATURAL AND APPLIED SCIENCESUNIVERSITY OF ÇUKUROVASupervisor: Prof. Dr. Hamide KAVAKYear: 2006, Pages: 106Jury: Prof. Dr. Hamide KAVAKProf. Dr. Ramazan ESENProf. Dr. Birgül YAZICIIn this work, ZnO thin films were produced on glass and silicon substrates byPulsed Filtered Cathodic Vacuum Arc Deposition Method at room temperature forthe same thickness at different pressure and for different thickness at the samepressure. Furthermore, the influence of thickness and pressure on the optical andstructural properties were investigated for the produced ZnO thin films.Key Words: PFCVAD Method, Thin Film, ZnOV
Author
Meryem Derya Özdemir
How to Cite
Meryem Derya Özdemir (Master Thesis). Optical and structural properties of ZnO thin films which are grown by cathodic arc deposition, 2006, Çukurova University.
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