Coating on different surfaces with carbon and nitrogen doped carbon films by using electron cyclotron microwave plasma (ECR-MP) method
2020
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Advisor: Prof. Dr. Hamide Kavak
Abstract (EN)
In this study, nitrogen doped and as deposited carbon thin films were grown by Electron Cyclotron Resonant Microwave Plasma (ECR-MP) method on metal (steel, braces, dental implants, aluminum), silicon and glass substrates. Methane (CH4) gas was used for plasma formation. Optical, structural and surface properties of coatings grown on different substrates were determined. At the same time, friction and wear tests of the samples grown on metal substrates were performed.
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Özlem Çelikel
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Özlem Çelikel (Master Thesis). Coating on different surfaces with carbon and nitrogen doped carbon films by using electron cyclotron microwave plasma (ECR-MP) method, 2020, Çukurova University.
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