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Deposition and characterization of ZnO:Al compounds by pulsed filtered cathodic vacuum arc deposition technique

2011
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Advisor: Yrd. Doç. Dr. Şadi Yılmaz

Abstract (EN)

In this study, aluminum doped zinc oxide thinfilms (ZnO:Al) were produced at room temperature on glass substrates by a pulsed filtered cathodic vacuum arc deposition system. Furthermore, the influences of temperature and pressure on the optical and electrical properties were investigated for the produced Al-ZnO thin films.

Author

Deniz Kadir Takcı

How to Cite

Deniz Kadir Takcı (Master Thesis). Deposition and characterization of ZnO:Al compounds by pulsed filtered cathodic vacuum arc deposition technique, 2011, Çukurova University.

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