Deposition and characterization of ZnO:Al compounds by pulsed filtered cathodic vacuum arc deposition technique
2011
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Danışman: Yrd. Doç. Dr. Şadi Yılmaz
Özet (EN)
In this study, aluminum doped zinc oxide thinfilms (ZnO:Al) were produced at room temperature on glass substrates by a pulsed filtered cathodic vacuum arc deposition system. Furthermore, the influences of temperature and pressure on the optical and electrical properties were investigated for the produced Al-ZnO thin films.
Yazar
Deniz Kadir Takcı
Bu Yayına Nasıl Atıf Yapılır
Deniz Kadir Takcı (Master Thesis). Deposition and characterization of ZnO:Al compounds by pulsed filtered cathodic vacuum arc deposition technique, 2011, Çukurova University.
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