Production of gold and silver coated substrates for sers raman and application on MW ECR plasma system DLC thin films

In this study, DLC thin films were deposited on glass, Au (gold), Ag (silver) Nanoparticle coated substrates by MW ECR plasma deposition system at room temperature. The methane (CH4) gas was used for producing the plasma. The optical properties (absorption coefficient, optical band gap,absorption band edge) were determined. The surface topology was studied with atomic force microscopy (AFM) and crystal structure of the films studied by XRD diffraction analysis. The molecular structure of the films are determined by Infrared Spectrometer. The vibrational properties of the films were studied also by Raman Spectroscopy. Additionally, SERS properties investigated for Au and Ag coated substrates and EF (Enchancement Factor) was calculated.