Zno ınce filmin bazı özelliklerinin araştırması

The aim of this work was the study of sputtered zinc oxide (ZnO) film deposition, how the optical and structural properties of films based on the heated substrates during deposition can be altered. In recent years there has been increased interest in ZnO in terms of its potential applications. The electrical, optoelectronic and photochemical properties of ZnO thin film have resulted in its use for solar cells [8], transparent electrodes and blue/UV light emitting devices [9]. In this work, Zinc-Oxide (ZnO) thin films were deposited using reactive sputtering method. The reactive DC sputtering was performed with a Zinc (Zn) target and oxygen as a reactive gas, on an amorphous glass slides of few millimeters thickness. The effects of the increase in substrate temperature during deposition ranging from RT to 400 °C on the optical and structural properties of ZnO thin films have been studied. The crystalline structure, surface topology, and optical properties of the films were determined using X-ray diffraction (XRD), atomic force microscopy (AFM), and UV-Vis Spectrophotometer, respectively. X-ray diffraction measure showed that the films with substrate temperatures from RT – 3000C were single crystalline in nature with (002) c-axis oriented crystallite of hexagonal wurtzite structure. However, as the temperature reached 400 °C the film appears to be polycrystalline with (100), (002), (101), (110) and (103) oriented crystallites of same hexagonal wurtzite structure. Crystalline property and grain size of the films were found to increase as the temperature of the substrate increases. The optical bandgap of the ZnO film were found red shifted in the range of 3.353 – 3.001 eV, as the substrates temperature increased bandgap energy of the films decreased. And according to the images taken by AFM, its shows that root mean square (rms) values of surface roughness for the films were in variation which shows a better smoothness as the temperature increases. And from the UV-Vis spectrophotometer, almost all the film showed transmittance over 80% in the visible light range spectrum, the transmittance decreases with the increase in the temperature. All the results indicate that, as the substrate temperature increases the films photoactive performance found to be increasing decreases with improve in roughness and smoothness on their surface.